Allen, James J. <br/><br/>
Micro electro mechanical system design / 
James J. Allen. 
 - Boca Raton :  Taylor & Francis,  2005. 
 - 465 p. :  ill. ;  23 cm. 
 - Mechanical engineering ;  192 .
 - Mechanical engineering (Taylor & Francis) ;  192. .
<br/><br/> http://www.amazon.com/Electro-Mechanical-System-Design-Engineering/dp/0824758242/ref=sr_1_1?s=books&ie=UTF8&qid=1410003656&sr=1-1&keywords=0824758242 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0824758242 (alk. paper) 
<br/><br/><label>LCCN: </label>2005041771 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction. - ME<br/>Engineering design.
<br/><br/><label>LC Class. No.: </label>TK153  / .A47 2005 
<br/><br/><label>Dewey Class. No.: </label>621 ALL