TY  - BOOK
AU  - Allen,James J.
TI  - Micro electro mechanical system design
T2  - Mechanical engineering
SN  - 0824758242 (alk. paper)
AV  - TK153 .A47 2005
U1  - 621 ALL 
PY  - 2005///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Microelectromechanical systems
KW  - Design and construction. - ME
KW  - Engineering design
N1  - http://www.amazon.com/Electro-Mechanical-System-Design-Engineering/dp/0824758242/ref=sr_1_1?s=books&ie=UTF8&qid=1410003656&sr=1-1&keywords=0824758242; Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0648/2005041771-d.html
ER  -