Chang Liu <br/><br/>
Foundations of MEMS 

 - USA:  Pearson Education,  2006. 
<br/><br/><label>ISBN: </label>013199204 
<br/><br/><label>Subjects--Topical Terms: </label>
<br/><br/><label>Dewey Class. No.: </label>621.381  / LIU