Microchip fabrication : a practical guide to semiconductor processing /
Peter Van Zant.
- Sixth edition.
- New York : McGraw-Hill Professional, c2014
- xxiii, 548 pages : illustrations ; 24 cm
Includes bibliographical references and index.
"This fully updated introduction to semiconductor manufacturing--the industry that drives high tech--offers a low-math, straightforward approach to the entire process, from raw materials through shipping the finished, packaged device"--