TY  - BOOK
AU  - Middleman,Stanley
AU  - Hochberg,Arthur K.
TI  - Process engineering analysis in semiconductor device fabrication
SN  - 0070418535
AV  - TK7871.85 .M555 1993
U1  - 621.38152 MID 
PY  - 1993///
CY  - New York
PB  - McGraw-Hill
KW  - Semiconductors
KW  - Design and construction
KW  - EE, ME
N1  - Includes bibliographical references and index
ER  -