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Foundations of MEMS

by Chang Liu.

Material type: Text Text Publisher: USA: Pearson Hall, 2006Availability: Items available for loan: College of Electrical & Mechanical Engineering (CEME)Call number: 621.381 LLU (1).
Foundations of MEMS

by Chang Liu.

Material type: Text Text Publisher: USA: Pearson Education, 2006Availability: Items available for loan: College of Electrical & Mechanical Engineering (CEME)Call number: 621.381 LIU (2).
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