Design and manufacturing of active microsystems / Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors.

Contributor(s): Büttgenbach, S. (Stephanus), 1945- | Burisch, Arne | Hesselbach, JürgenMaterial type: TextTextSeries: Microtechnology and MEMSPublisher: Heidelberg, [Germany] : Springer, c2011ISBN: 9783642129025Subject(s): Microelectronics | Microelectromechanical systemsDDC classification: 658.5752 LOC classification: TK7874 | .D4744 2011TK7875Online resources: Full text available from SpringerLink ebooks - Chemistry and Materials Science (2011) SpringerLink ebooks - Chemistry and Materials Science (2011)
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Item type Current location Home library Shelving location Call number Status Date due Barcode Item holds
Book Book School of Mechanical & Manufacturing Engineering (SMME)
School of Mechanical & Manufacturing Engineering (SMME)
General Stacks 658.5752 DES (Browse shelf) Available SMME-1929
Total holds: 0

Includes bibliographical references and index.

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