Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrovic.

By: Makabe, TContributor(s): Petrovic, ZSeries: Series in plasma physics: Publisher: [S.l.] : Taylor & Francis, 2006Description: 360 p. ; 16 cmISBN: 0750309768; 9780750309769DDC classification: 620.044
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Item type Current location Home library Call number Status Date due Barcode Item holds
Book Book School of Natural Sciences (SNS)
School of Natural Sciences (SNS)
620.044 MAK (Browse shelf) Available SNS0000991
Total holds: 0

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