| 000 | 00756cam a22002294a 4500 | ||
|---|---|---|---|
| 020 | _a9780849391378 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 082 | 0 | 0 |
_a621.381 _222 |
| 245 | 0 | 0 |
_aMEMS : introduction and fundamentals _cedited by Mohamed Gad-El-Hak. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton : _bCRC/Taylor & Francis, _c2006. |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c26 cm. |
||
| 490 | 1 | _aMechanical engineering series | |
| 490 | 0 | _aThe MEMS handbook | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aMicroelectronics. | |
| 650 | 0 | _aNanotechnology. | |
| 700 | 1 |
_aGad-el-Hak, Mohamed, _d1945- |
|
| 830 | 0 | _aMechanical engineering series (Boca Raton, Fla.) | |
| 942 |
_2ddc _cBK |
||
| 999 |
_c11430 _d11430 |
||