| 000 | 01424cam a22003134a 4500 | ||
|---|---|---|---|
| 001 | 12864103 | ||
| 005 | 20170105102348.0 | ||
| 008 | 020722s2003 njua b 001 0 eng | ||
| 010 | _a 2002027385 | ||
| 020 | _a0471201693 (cloth : alk. paper) | ||
| 040 |
_aDLC _cDLC _dDLC |
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| 042 | _apcc | ||
| 082 | 0 | 0 |
_a621.381 _221 |
| 100 | 1 | _aRebeiz, Gabriel M. | |
| 245 | 1 | 0 |
_aRF MEMS : theory, design, and technology _btheory, design, and technology _cGabriel M. Rebeiz |
| 260 |
_aHoboken, NJ : _bJ. Wiley, _c2003. |
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| 300 |
_axx, 483 p. : _bill. ; _c26 cm. |
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| 500 | _a"A Wiley-Interscience publication." | ||
| 504 | _aIncludes bibliographical references (p. 477) and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aVery high speed integrated circuits. | |
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/bios/wiley044/2002027385.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley037/2002027385.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley031/2002027385.html |
| 856 | 4 | 2 |
_3Book review (E-STREAMS) _uhttp://www.e-streams.com/es0701/es0701_2959.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 999 |
_c11782 _d11782 |
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