| 000 | 01368 a2200229 4500 | ||
|---|---|---|---|
| 003 | Nust | ||
| 005 | 20230317113523.0 | ||
| 010 | _a 88015503 | ||
| 020 | _a9024737338 | ||
| 040 | _cNust | ||
| 082 | 0 | 0 | _a621.395,EME |
| 245 | 1 | 0 |
_aEmerging technologies for in situ processing / _cedited by Daniel J. Ehrlich and Van Tran Nguyen. |
| 260 |
_aDordrecht ; _aBoston : _bM. Nijhoff ; _aNorwell, MA, USA : _bDistributors for the U.S. and Canada, Kluwer Academic Publishers, _c1988. |
||
| 300 |
_ax, 290 p. : _bill. ; _c25 cm. |
||
| 440 | 0 |
_aNATO ASI series. _nSeries E, _vno. 139 _9104591 |
|
| 505 | _aIn-Situ processing combining MBE (Page-1), Motivations and early demonstration for In-Situ processing (Page-13), Laser eching and microelectronic applications (Page-23), Laser induced chemical processing of materials (Page-33), High technology manufacturing (Page-45), Ultra high vaccum processing (Page-55), Expitaxial growth of III-V materials (Page-61), Ion lithgraphy projection (Page-113), Direct writing of silicon conductors (Page-265), Subject index (Page-289). | ||
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration _xDesign and construction _xCongresses. _9110510 |
|
| 700 | 1 |
_aEhrlich, Daniel J. _9110511 |
|
| 700 | 1 |
_aNguyen, Van Tran. _9110512 |
|
| 710 | 2 |
_aNorth Atlantic Treaty Organization. _bScientific Affairs Division. _995775 |
|
| 942 |
_cBK _2ddc |
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| 999 |
_c193616 _d193616 |
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