000 00221 a2200097 4500
001 12826
100 _aFranssila,S
245 _aIntroduction to Microfabrication
260 _a
_bJohn Wiley & Sons
_c
090 _c9807
_d9807
942 _aNUST-CAE
_cM
_c36719
999 _c247899
_d247899