000 00308 a2200133 4500
001 12904
082 _a621.381 BEE
090 _c9879
_d9879
100 _aBeeby Stephen
245 _aMEMS Mechanical Sensors
260 _aLONDON
_bArtech House
_c2004
300 _ax, 269
740 _aMechanical Sensors
942 _aNUST-CAE
_k621.381 BEE
999 _c247977
_d247977