000 00298 a2200121 4500
001 32848
082 _a621.381 REB
090 _c22016
_d22016
100 _aRebeiz,G.M
245 _aRF MEMS ; theory, design and technology
260 _aNJ
_bJohn Wiley Interscience
_c2003
300 _axx, 483 p
942 _aNUST-CAE
_k621.381 REB
999 _c267921
_d267921