| 000 | 00278 a2200097 4500 | ||
|---|---|---|---|
| 001 | 33008 | ||
| 100 | _aLysheveski,S.E | ||
| 245 | _aNano-and microelectromechanical systems: Fundamentals of Nano and microengineering | ||
| 260 |
_aLondon _bCRC Press _c2001 |
||
| 090 |
_c22134 _d22134 |
||
| 942 |
_aNUST-CAE _cM _c13486 |
||
| 999 |
_c268081 _d268081 |
||