000 00234 a2200097 4500
001 51359
100 _aDushman S
245 _aScientific Foundations of Vacuum Techniques
260 _aNew York
_bJohn Wiley
_c
090 _c32550
_d32550
942 _aNUST-CAE
_cM
_c25059
999 _c286432
_d286432