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| 001 | 63686 | ||
| 082 | _a621.381MAL | ||
| 090 |
_c37680 _d37680 |
||
| 100 | _aMaluf, N | ||
| 245 | _aIntroduction to Microlelectromechanical systems engineering | ||
| 250 | _a2 | ||
| 260 | _bArtech House | ||
| 300 | _axx,283p. | ||
| 942 |
_aNUST-CAE _k621.381MAL |
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_c298759 _d298759 |
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