000 00326 a2200133 4500
001 63727
082 _a621.38152 GHA
090 _c37708
_d37708
100 _aGhandhi, Sorab
245 _aVLSI Fabrication Principles : silicon and gallium arsenide
250 _a1
260 _aN.Y
_bJohn Wiley
_c1994
300 _a860p
942 _aNUST-CAE
_k621.38152 GHA
999 _c298800
_d298800