000 00331 a2200133 4500
001 63732
082 _a621.38152 GHA
090 _c37709
_d37709
100 _aGhandhi, Sorab
245 _aVLSI Fabrication Principles : silicon and gallium arsenide, 2/e
250 _a2
260 _aN.Y
_bJohn Wiley
_c1994
300 _a860p
942 _aNUST-CAE
_k621.38152 GHA
999 _c298805
_d298805