000 00318 a2200133 4500
001 64479
082 _a621.381322 SAN
090 _c38104
_d38104
100 _aSantos H J
245 _aIntro to microelectromechavical
_hEnglish
250 _a2
260 _aBoston
_bArtech house
_c2004
300 _axiii, 221p.
942 _aNUST CAE
_k621.381322 SAN
999 _c299552
_d299552