| 000 | 01587cam a22004097a 4500 | ||
|---|---|---|---|
| 001 | 8566828 | ||
| 003 | OSt | ||
| 005 | 20211014100115.0 | ||
| 006 | m d | ||
| 007 | cr n | ||
| 008 | 091022s2011 gw a sb 001 0 eng d | ||
| 015 |
_aGBB065998 _2bnb |
||
| 016 | 7 |
_a015563219 _2Uk |
|
| 020 | _a9783642108051 (hbk.) | ||
| 035 | _a(WaSeSS)ssj0000449360 | ||
| 038 | _aKhadija | ||
| 040 |
_aUKM _cUKM _dBTCTA _dYDXCP _dUUS _dGZQ _dVRC _dDLC _dWaSeSS |
||
| 042 | _alccopycat | ||
| 050 | 4 |
_aTJ163.12 _b.E44 2011 |
|
| 050 | 4 | _aTK7875 | |
| 082 | 0 | 4 |
_a621.3 _222 _bEIE |
| 210 | 1 | 0 | _aElectromechanical systems in microtechnology and mechatronics |
| 245 | 0 | 0 |
_aElectromechanical systems in microtechnology and mechatronics : _belectrical, mechanical and acoustic networks, their interactions and applications / _cArno Lenk ... [et al.]. |
| 260 |
_aHeidelberg ; _aLondon : _bSpringer, _cc2011. |
||
| 490 | 1 | _aMicrotechnology and MEMS | |
| 504 | _aIncludes bibliographical references (p. [453]-457) and index. | ||
| 506 | _aLicense restrictions may limit access. | ||
| 563 | _ahardcover | ||
| 650 | 0 |
_aMechatronics. _935774 |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign. _983110 |
|
| 700 | 1 |
_aLenk, Arno. _983111 |
|
| 773 | 0 | _tSpringerLink ebooks - Chemistry and Materials Science (2011) | |
| 830 | 0 |
_aMicrotechnology and MEMS. _983112 |
|
| 856 | 4 | 0 |
_uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio8566828 _zFull text available from SpringerLink ebooks - Chemistry and Materials Science (2011) |
| 910 | _aLibrary of Congress record | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c33181 _d33181 |
||