| 000 | 00428nam a22001697a 4500 | ||
|---|---|---|---|
| 003 | NUST | ||
| 020 | _a978-81-322-0663-7 | ||
| 038 | _akhadija | ||
| 082 |
_a621.381 _bADA |
||
| 100 |
_aAdams, A. Richard _983305 |
||
| 245 |
_aIntroductory MEMS: _bFabrication and Applications / _cThomas M. Adams |
||
| 260 |
_aNew Delhi _bSpringer _c2012. |
||
| 300 |
_a444 p. ; _b23cm |
||
| 500 | _aPaperback. | ||
| 563 | _aPB | ||
| 942 |
_cBK _2ddc |
||
| 999 |
_c33350 _d33350 |
||