| 000 | 01276cam a2200373 a 4500 | ||
|---|---|---|---|
| 001 | 8569414 | ||
| 003 | USPCAS-E | ||
| 005 | 20180118181420.0 | ||
| 006 | m d | ||
| 007 | cr n | ||
| 008 | 091216s2010 ne a sbf 001 0 eng d | ||
| 020 | _z9780815520375 | ||
| 020 | _a9780080946580 | ||
| 035 | _a(WaSeSS)ssj0000419251 | ||
| 040 |
_aCaPaEBR _cCaPaEBR _dWaSeSS |
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| 050 | 4 |
_aTS695 _b.M38 2010eb |
|
| 050 | 4 | _aTS695 | |
| 082 |
_222 _a671.735 _bMAT-H 2010 |
||
| 100 | 1 | _aMattox, D. M. | |
| 210 | 1 | 0 | _aHandbook of physical vapor deposition (PVD) processing |
| 245 | 1 | 0 |
_aHandbook of physical vapor deposition (PVD) processing _cDonald M. Mattox. |
| 250 | _a2nd ed. | ||
| 260 |
_aAmsterdam : _bElsevier, _c2010. |
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| 502 | _a. | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 506 | _aLicense restrictions may limit access. | ||
| 650 | 0 |
_aPhysical vapor deposition _vHandbooks, manuals, etc. |
|
| 655 | 7 |
_aElectronic books. _2local |
|
| 710 | 2 | _aebrary, Inc. | |
| 773 | 0 | _teBook - Materials Science 2010 [EBCMS10] | |
| 856 | 4 | 0 |
_uhttp://www.columbia.edu/cgi-bin/cul/resolve?clio8569414 _zFull text available from eBook - Materials Science 2010 [EBCMS10] |
| 910 | _aVendor-generated brief record | ||
| 942 |
_2ddc _cBK |
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| 999 |
_c355988 _d355988 |
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