| 000 | 00417nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 210430s9999 xx 000 0 und d | ||
| 020 | _a0-85296-998-8 | ||
| 082 | _a621.38152 P9621 | ||
| 100 |
_aCarl Mikael zetterling _952830 |
||
| 245 |
_aProcess technology for Silicon Carbide Devices / _cCarl Mikael zetterling |
||
| 260 |
_aSweden _bKTH Royal Institute of Technology _c2002 |
||
| 300 | _a176p. | ||
| 942 |
_cBK _2ddc |
||
| 999 |
_c563027 _d563027 |
||