| 000 | 00391nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 210430s9999 xx 000 0 und d | ||
| 020 | _a978-81-7992-906-3 | ||
| 082 | _a537.6 S47111 S | ||
| 100 |
_aGary E.McGuire _954356 |
||
| 245 |
_aSemiconductor Materials and Process Technology Handbook _cGary E.McGuire |
||
| 260 |
_aUSA _bJaico Publishing _c2008 |
||
| 300 | _a675 p | ||
| 942 |
_cBK _2ddc |
||
| 999 |
_c564917 _d564917 |
||