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| 001 | 12646444 | ||
| 003 | CEME | ||
| 005 | 20210628201517.0 | ||
| 008 | 020116s2002 njua b 101 0 eng | ||
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_aTK7874 _b.J33 2002 |
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| 100 | 1 |
_aJaeger, Richard C. _955586 |
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| 245 | 1 | 0 |
_aIntroduction to microelectronic fabrication / _cRichard C. Jaeger. |
| 250 | _a2nd ed. | ||
| 260 |
_aUpper Saddle River, N.J. : _bPrentice Hall, _cc2002. |
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| 300 |
_axiv, 316 p. : _bill. ; _c24 cm. |
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| 490 | 1 |
_aModular series on solid state devices ; _vv. 5 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration _xDesign and construction _vTextbooks. _955587 |
|
| 830 | 0 |
_aModular series on solid state devices (Upper Saddle River, N.J.) ; _vv. 5. _955588 |
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_2ddc _cBK |
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