| 000 | 01263cam a2200337 a 4500 | ||
|---|---|---|---|
| 001 | 12936268 | ||
| 003 | CEME | ||
| 005 | 20210628201523.0 | ||
| 008 | 020919s2002 enka b 001 0 eng d | ||
| 010 | _a 2002512459 | ||
| 015 | _aGBA1-Z8391 | ||
| 020 | _a3527302573 | ||
| 035 | _a(OCoLC)ocm45647850 | ||
| 040 |
_aUKM _cUKM _dOHX _dTXH _dDLC |
||
| 042 | _alccopycat | ||
| 050 | 0 | 0 |
_aQC611 _b.K75 2002 |
| 072 | 7 |
_aTA _2lcco |
|
| 082 | 0 | 4 |
_a621.38152 _221 |
| 100 | 1 |
_aKorvink, J. G., GREINER, ANDREAS _q(Jan G.) _955634 |
|
| 245 | 1 | 0 |
_aSemiconductors for micro- and nanotechnology, an introduction for engineers _ban introduction for engineers / _cJan G. Korvink and Andreas Greiner. |
| 260 |
_aWeinheim : _bWiley-VCH, _cc2002. |
||
| 300 |
_a340 p. : _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _vTextbooks. _955635 |
|
| 650 | 0 |
_aNanotechnology _xMathematics _vTextbooks. _955636 |
|
| 650 | 0 |
_aMicrotechnology _xMathematics _vTextbooks. _955637 |
|
| 700 | 1 |
_aGreiner, Andreas. _955638 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley0310/2002512459.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley031/2002512459.html |
| 942 |
_2ddc _cBK |
||
| 999 |
_c566415 _d566415 |
||