| 000 | 01060cam a22003014a 4500 | ||
|---|---|---|---|
| 001 | 13506387 | ||
| 003 | CEME | ||
| 005 | 20210628201539.0 | ||
| 008 | 040301s2004 enka b 001 0 eng | ||
| 010 | _a 2004004940 | ||
| 020 | _a0470851058 (cloth) | ||
| 020 | _a0470851066 (pbk.) | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.F73 2004 |
| 082 | 0 | 0 |
_a621.3 _222 |
| 100 | 1 |
_aFranssila, Sami. _955755 |
|
| 245 | 1 | 0 |
_aIntroduction to microfabrication / _cSami Franssila. |
| 260 |
_aChichester, West Sussex, England ; _aHoboken, NJ : _bJ. Wiley, _cc2004. |
||
| 300 |
_axvii, 401 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _955756 |
|
| 650 | 0 |
_aElectronic apparatus and appliances. _910193 |
|
| 650 | 0 |
_aMicrofabrication. _955757 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley041/2004004940.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley041/2004004940.html |
| 942 |
_2ddc _cBK |
||
| 999 |
_c566461 _d566461 |
||