| 000 | 00508nam a22001937a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628201731.0 | ||
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| 020 | _a1-58053-871-1 | ||
| 040 | _c. | ||
| 082 | _a621.3813 SAN | ||
| 100 |
_aSantos, Hector J.De _956581 |
||
| 245 | _aIntroduction to microelectromechanical microwave systems | ||
| 250 | _a2ND | ||
| 260 |
_aBOSTON _bARTECH HOUSE _c2004 |
||
| 300 | _aXIII,221P | ||
| 650 |
_aMICROWAVE DEVICES.MEMS _956582 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c566966 _d566966 |
||