| 000 | 00412nam a22001697a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628202447.0 | ||
| 008 | 210315b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0-7503-0311-5 | ||
| 040 | _c. | ||
| 082 | _a621.38152 HAN'G | ||
| 100 |
_aGlocker, D. A _960003 |
||
| 245 | _aHandbook of thin flim process technology | ||
| 260 |
_aLONDON _bIOP _c1995 |
||
| 300 | _aX7, 3.4 | ||
| 942 |
_cBK _2ddc |
||
| 999 |
_c569848 _d569848 |
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