000 00592nam a22001817a 4500
003 CEME
005 20210628202847.0
008 210118b xxu||||| |||| 00| 0 eng d
020 _a0-8247-2637-5
040 _c.
082 _a629.135 OSI
100 _aOsiander, Robert, Darrin, M.Ann Garrison, Champion, John L
_962002
245 _aMems and microstructures in aerospace applications
260 _aNEW DLEHI
_bTAYLOR
_c2006
300 _a388 P
650 _aAERONAUTICAL INSTRUMENTS, AEROSPACE ENGINEERING EQUIPMENT ANS SUPPLIES, MICROELECROMECHANICAL SYSTEMS
_962003
942 _cBK
_2ddc
999 _c571255
_d571255