| 000 | 00565nam a22001937a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203006.0 | ||
| 008 | 210126b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1-58053-590-9 | ||
| 040 | _c. | ||
| 082 | _a621.381 MAL | ||
| 100 |
_aMaluf, Nadim Williams, Kirt _962759 |
||
| 245 | _aAn introduction to microelectromechanical systems engineering:mem mems | ||
| 250 | _a2ND | ||
| 260 |
_aLONDON _bARTECH HOUSE _c2004 |
||
| 300 | _aXX,282P | ||
| 650 |
_aMICROELECTROMECHANICAL SYSTEMS ELECTROMECHANICAL SYSTEMS.MEM _962760 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c571765 _d571765 |
||