| 000 | 00479nam a22001697a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203125.0 | ||
| 008 | 210201b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0750305983 | ||
| 040 | _c. | ||
| 082 | _a621.38152 HAN | ||
| 100 |
_aGlocker, David.A , Shah, Ismat.S _963456 |
||
| 245 | _aHandbook of thin film process technology , vol-2 | ||
| 260 |
_aLONDON _bINSTITUTE OF PHYSICS _c1995 |
||
| 650 |
_aTHIN FILM PROCESS TECHNOLOGY _963457 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c572272 _d572272 |
||