000 00512nam a22001817a 4500
003 CEME
005 20210628203127.0
008 210201b xxu||||| |||| 00| 0 eng d
020 _a0521822815
040 _c.
082 _a621.38152 FRE
100 _aFreund, L.B , Suresh, S
_963473
245 _aThin film materials , stress, defect formation and surface evolution
260 _aUSA
_bCAMBRIDGE UNIVERSITY PRESS
_c2003
300 _aXVIII, 802P
650 _aTHIN FILM MATERIALS
_963474
942 _cBK
_2ddc
999 _c572281
_d572281