| 000 | 00421nam a22001697a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203512.0 | ||
| 008 | 210420b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0-07-019339-8 | ||
| 040 | _c. | ||
| 082 | _a621.38173 ELL | ||
| 100 |
_aElliott,David .J _965856 |
||
| 245 | _aIntegrated circuit fabrication technology | ||
| 260 |
_aNEW YORK _bMCGRAW HILL _c1989 |
||
| 300 | _a540P | ||
| 942 |
_cBK _2ddc |
||
| 999 |
_c573947 _d573947 |
||