| 000 | 00606nam a22001937a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628203944.0 | ||
| 008 | 210104b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781420055191 | ||
| 040 | _cceme | ||
| 082 | _a620.5 MAD | ||
| 100 |
_aMadou, Marc.J _967998 |
||
| 245 | _aFundamentals of microfabricaiton and nanotechnology, manufacturing techniques for microfabrication and nanotechnology | ||
| 250 | _a3RD | ||
| 260 |
_aINDIA _bCRC PRESS _c2012 |
||
| 300 | _aVOL-2,XIII, 647P | ||
| 650 |
_aMICROELECTROMECHANICAL SYSTEMS.MICROFLUIDS.SOLID STATE PHYSICS _967999 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c575667 _d575667 |
||