| 000 | 00336nam a22001337a 4500 | ||
|---|---|---|---|
| 020 | _a978-0-470-08301-7 | ||
| 082 | _a621.381 | ||
| 100 |
_aTAI RAN HSU _969350 |
||
| 245 | _aMEMS AND MICROSYSTEMS DESIGN MANUFACTURE AND NANOSCALE ENGINEERING | ||
| 250 | _a2ND | ||
| 260 |
_aUSA _bJOHN WILEY _c2008 |
||
| 300 | _axxv,550p | ||
| 942 | _cBK | ||
| 999 |
_c576677 _d576677 |
||