| 000 | 00490nam a22001817a 4500 | ||
|---|---|---|---|
| 003 | CEME | ||
| 005 | 20210628205045.0 | ||
| 008 | 210128b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9812-53-072-X | ||
| 040 | _c. | ||
| 082 | _a621.38152 MAY | ||
| 100 |
_aMay, Gary S:Sze, Simon M _973674 |
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| 245 | _aFundamentals of semiconductor fabrication | ||
| 260 |
_aNEW DELHI _bJOHN WILEY & SONS _c2004 |
||
| 300 | _aXIII,305P | ||
| 650 |
_aSEMICONDUCTOR FABRICATION _973675 |
||
| 942 |
_cBK _2ddc |
||
| 999 |
_c579328 _d579328 |
||