000 00489nam a22001937a 4500
003 CEME
005 20210628210020.0
008 210210b xxu||||| |||| 00| 0 eng d
020 _a0-7503-0495-2
040 _c.
082 _a621.55 CHA
100 _aChamers, A Fitch, R. K Halliday, B. S
_977840
245 _aBasic vacuum technology
250 _a2ND
260 _aBRISTOL
_bINSTITUTE OF PHYSICS
_c1998
300 _a189
650 _aVACUUM TECHNOLOGY
_977841
942 _cBK
_2ddc
999 _c583046
_d583046