| 000 | 00511nam a22001337a 4500 | ||
|---|---|---|---|
| 040 | _cNUST | ||
| 082 | _a200 THE | ||
| 100 |
_aMuhammad Ahmad Raza Tahir _984237 |
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| 110 |
_aSupervisor Dr. Muhammad Mubasher Saleem _984238 |
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| 245 | _aTH-SOF-1852-Design of Capacitive Micro-Electro-Mechanical-Systems (MEMS) Accelerometer, Considering Residual Stress, Temperature Variations and Thermoelastic Damping | ||
| 260 |
_aISLAMABAD: _bNUST COLLEGE OF EME, _c2021. |
||
| 650 |
_aMS-MTS-18 _984239 |
||
| 942 |
_2ddc _cTHE |
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| 999 |
_c586782 _d586782 |
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