000 00371nam a22001457a 4500
020 _a9780132497367
040 _cNUST
082 _a621.381 LIU
100 _aLiu, Chang
_962427
245 _aFoundations of MEMS
250 _a2nd Edition
260 _aUpper Saddle River;
_bPearson Prentice Hall,
_c2012.
650 _aFoundations of MEMS
_9112276
942 _2ddc
_cBK
999 _c594737
_d594737