| 000 | 01464cam a2200337 a 4500 | ||
|---|---|---|---|
| 001 | 16141073 | ||
| 003 | NUST-PNEC | ||
| 005 | 20170116180655.0 | ||
| 008 | 100317s2010 enka b 001 0 eng | ||
| 010 | _a 2010010076 | ||
| 020 | _a9780470749838 | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 050 | 0 | 0 |
_aTK7875 _b.F73 2010 |
| 082 | 0 | 0 | _a621.381 FRA |
| 100 | 1 | _aFranssila, Sami. | |
| 245 | 1 | 0 |
_aIntroduction to microfabrication / _cSami Franssila. |
| 250 | _a2nd ed. | ||
| 260 |
_aChichester, West Sussex [England] : _bJohn Wiley & Sons, _c2010. |
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| 300 |
_axiv, 518 p. : _bill. ; _c26 cm. |
||
| 500 | _ahttp://www.amazon.com/Introduction-Microfabrication-Sami-Franssila/dp/0470749830/ref=sr_1_1?s=books&ie=UTF8&qid=1405923847&sr=1-1&keywords=9780470749838 | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _xME, EL, EE |
|
| 650 | 0 | _aElectronic apparatus and appliances. | |
| 650 | 0 | _aMicrofabrication. | |
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy1201/2010010076-b.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy1201/2010010076-d.html |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy1201/2010010076-t.html |
| 906 |
_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 999 |
_c60356 _d60356 |
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