| 000 | 00331nam a22001097a 4500 | ||
|---|---|---|---|
| 040 | _cSCME | ||
| 100 |
_aJeffrey B.Fortin _9122735 |
||
| 245 | _aChemical Vapor Deposition Polymerization The Growth and Properties of parylene thin Films | ||
| 260 |
_aNew York _bKluwer Academic Publisher _c2004 |
||
| 300 | _a102p. | ||
| 942 |
_2ddc _cREF |
||
| 999 |
_c609181 _d609181 |
||