000 00311nam a22001337a 4500
020 _a013199204
040 _cNUST
082 _a621.381
_bLIU
100 _aChang Liu
_9123984
245 _aFoundations of MEMS
260 _aUSA:
_bPearson Education,
_c2006.
650 _2Foundations of MEMS
942 _2ddc
_cBK
999 _c610466
_d610466