Fundamentals of microfabrication : (Record no. 32370)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01506cam a22003734a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 12490201 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OSt |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20211022103830.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 010801s2002 flua b 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 2001043273 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0849308267 (alk. paper) |
| 038 ## - RECORD CONTENT LICENSOR | |
| Staff Name | khadija |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | DLC |
| Transcribing agency | DLC |
| Modifying agency | DLC |
| 042 ## - AUTHENTICATION CODE | |
| Authentication code | pcc |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7836 |
| Item number | .M33 2002 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Edition number | 21 |
| Author Mark | MAD |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Madou, Marc J. |
| 245 10 - TITLE STATEMENT | |
| Title | Fundamentals of microfabrication : |
| Remainder of title | the science of miniaturization / |
| Statement of responsibility, etc. | Marc J. Madou. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boca Raton : |
| Name of publisher, distributor, etc. | CRC Press, |
| Date of publication, distribution, etc. | c2002. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 723 p. : |
| Other physical details | col. ill. ; |
| Dimensions | 29 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 563 ## - BINDING INFORMATION | |
| Binding note | Hardcover |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits |
| General subdivision | Design and construction. |
| 9 (RLIN) | 35781 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectromechanical systems |
| General subdivision | Design and construction. |
| 9 (RLIN) | 83354 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Machining. |
| 9 (RLIN) | 35894 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronic packaging. |
| 9 (RLIN) | 28736 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Lasers |
| General subdivision | Industrial applications. |
| 9 (RLIN) | 55991 |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | Publisher description |
| Uniform Resource Identifier | <a href="http://www.loc.gov/catdir/enhancements/fy0646/2001043273-d.html">http://www.loc.gov/catdir/enhancements/fy0646/2001043273-d.html</a> |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
| a | 7 |
| b | cbc |
| c | orignew |
| d | 1 |
| e | ocip |
| f | 20 |
| g | y-gencatlg |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | |
| Koha item type | Book |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Permanent Location | Current Location | Shelving location | Date acquired | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| School of Mechanical & Manufacturing Engineering (SMME) | School of Mechanical & Manufacturing Engineering (SMME) | General Stacks | 08/24/2015 | 621.38152 MAD | SMME-1120 | 03/28/2018 | 08/24/2015 | Book |