Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou.
Material type:
TextPublisher: Boca Raton : CRC Press, c2002Edition: 2nd edDescription: 723 p. : col. ill. ; 29 cmISBN: 0849308267 (alk. paper)Subject(s): Microelectronics | Integrated circuits -- Design and construction | Microelectromechanical systems -- Design and construction | Machining | Microelectronic packaging | Lasers -- Industrial applicationsDDC classification: 621.38152 LOC classification: TK7836 | .M33 2002Online resources: Publisher description
| Item type | Current location | Home library | Shelving location | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
Book
|
School of Mechanical & Manufacturing Engineering (SMME) | School of Mechanical & Manufacturing Engineering (SMME) | General Stacks | 621.38152 MAD (Browse shelf) | Available | SMME-1120 |
Total holds: 0
Includes bibliographical references and index.
Hardcover
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